X-ray photoelectron spectroscopy study of the deposition of TiO₂ thin films on self-assembly monolayer

X-ray photoelectron spectroscopy (XPS) was used to study the chemistry and film morphology during titanium oxide deposition from aqueous solution on functionalized surfaces prepared by oxidizing the end-functional groups self-assembled on glass. The results show that mercaptopropyltrimethoxysilane was successfully self-assembled on glass. Longer treatment of SAMs with hydrogen peroxide in acetic acid resulted in efficient conversion of the terminal group (SH-) to a sulfonate group. The deposition of thin films in TiCl₄ solution of varied acidity gave different yields, and there are different oxidation states of Ti in the TiO₂ thin film. The thin film showed excellent adhearence.