X-ray photoelectron spectroscopy study of the deposition of TiO2 thin films on self-assembly monolayer

Zhongdang Xiao, Dan Huang, Jianhua Gu, Zuhong Lu

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


X-ray photoelectron spectroscopy (XPS) was used to study the chemistry and film morphology during titanium oxide deposition from aqueous solution on functionalized surfaces prepared by oxidizing the end-functional groups self-assembled on glass. The results show that mercaptopropyltrimethoxysilane was successfully self-assembled on glass. Longer treatment of SAMs with hydrogen peroxide in acetic acid resulted in efficient conversion of the terminal group (SH-) to a sulfonate group. The deposition of thin films in TiCl4 solution of varied acidity gave different yields, and there are different oxidation states of Ti in the TiO2 thin film. The thin film showed excellent adhearence.

Original languageEnglish (US)
Pages (from-to)61-62
Number of pages2
JournalActa Physico - Chimica Sinica
Issue number1
StatePublished - 1998


  • Self-assembly monolayers
  • TiO thin films
  • XPS

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry


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