X-ray photoelectron spectroscopy depth profile of chemically modified porous silicon

A. Jasper Nijdam; Mark Ming Cheng Cheng; Mauro Ferrari

doi:10.1116/1.2178373

X-ray photoelectron spectroscopy depth profile of chemically modified porous silicon

A. Jasper Nijdam, Mark Ming Cheng Cheng, Mauro Ferrari

Houston Methodist Hospital

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A study of a short x-ray photoelectron spectroscopy (XPS) to verify if surface modifications actually penetrate into the porous silicon, were presented. The porous silicon surfaces were prepared by electrochemical etching in a homemade Teflon cell. The depth profile of the samples was performed on a Kratos Axis Ultra, with a monochromated A1 Kα x-ray gun using a concentric hemispherical analyzer. The results of the XPS depth profiling show that APTES and polyethylene glycol (PEG) chemically modified porous silicon were applied to the inner surface of the pores and not only on the outer surface.

Original language	English (US)
Pages (from-to)	852-854
Number of pages	3
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	24
Issue number	2
DOIs	https://doi.org/10.1116/1.2178373
State	Published - Mar 2006

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.2178373

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title = "X-ray photoelectron spectroscopy depth profile of chemically modified porous silicon",

abstract = "A study of a short x-ray photoelectron spectroscopy (XPS) to verify if surface modifications actually penetrate into the porous silicon, were presented. The porous silicon surfaces were prepared by electrochemical etching in a homemade Teflon cell. The depth profile of the samples was performed on a Kratos Axis Ultra, with a monochromated A1 Kα x-ray gun using a concentric hemispherical analyzer. The results of the XPS depth profiling show that APTES and polyethylene glycol (PEG) chemically modified porous silicon were applied to the inner surface of the pores and not only on the outer surface.",

author = "Nijdam, {A. Jasper} and Cheng, {Mark Ming Cheng} and Mauro Ferrari",

note = "Funding Information: This project has been funded with Federal Funds from the National Cancer Institute, National Institutes of Health, under Contract No. NO1-CO-12400. XPS equipment has been funded by NSF-DMR Grant No. 01104098. The authors would like to thank Lisa Hommel of the Surface Analysis Facility at the Ohio State University for her help with the XPS experiments. ",

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doi = "10.1116/1.2178373",

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AU - Nijdam, A. Jasper

AU - Cheng, Mark Ming Cheng

AU - Ferrari, Mauro

N1 - Funding Information: This project has been funded with Federal Funds from the National Cancer Institute, National Institutes of Health, under Contract No. NO1-CO-12400. XPS equipment has been funded by NSF-DMR Grant No. 01104098. The authors would like to thank Lisa Hommel of the Surface Analysis Facility at the Ohio State University for her help with the XPS experiments.

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N2 - A study of a short x-ray photoelectron spectroscopy (XPS) to verify if surface modifications actually penetrate into the porous silicon, were presented. The porous silicon surfaces were prepared by electrochemical etching in a homemade Teflon cell. The depth profile of the samples was performed on a Kratos Axis Ultra, with a monochromated A1 Kα x-ray gun using a concentric hemispherical analyzer. The results of the XPS depth profiling show that APTES and polyethylene glycol (PEG) chemically modified porous silicon were applied to the inner surface of the pores and not only on the outer surface.

AB - A study of a short x-ray photoelectron spectroscopy (XPS) to verify if surface modifications actually penetrate into the porous silicon, were presented. The porous silicon surfaces were prepared by electrochemical etching in a homemade Teflon cell. The depth profile of the samples was performed on a Kratos Axis Ultra, with a monochromated A1 Kα x-ray gun using a concentric hemispherical analyzer. The results of the XPS depth profiling show that APTES and polyethylene glycol (PEG) chemically modified porous silicon were applied to the inner surface of the pores and not only on the outer surface.

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X-ray photoelectron spectroscopy depth profile of chemically modified porous silicon

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