Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

A. G. Lopez; Harold G. Craighead

doi:10.1364/OL.23.001627

Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

A. G. Lopez, Harold G. Craighead

Research output: Contribution to journal › Article

65 Scopus citations

Abstract

We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ∼40 deg. The device is made from a multilayer (SiO₂/Si₃N₄) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.

Original language	English (US)
Pages (from-to)	1627-1629
Number of pages	3
Journal	Optics Letters
Volume	23
Issue number	20
DOIs	https://doi.org/10.1364/OL.23.001627
State	Published - Oct 15 1998

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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title = "Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating",

abstract = "We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ∼40 deg. The device is made from a multilayer (SiO2/Si3N4) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.",

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AU - Craighead, Harold G.

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N2 - We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ∼40 deg. The device is made from a multilayer (SiO2/Si3N4) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.

AB - We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ∼40 deg. The device is made from a multilayer (SiO2/Si3N4) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.

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