Abstract
We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ∼40 deg. The device is made from a multilayer (SiO2/Si3N4) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.
Original language | English (US) |
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Pages (from-to) | 1627-1629 |
Number of pages | 3 |
Journal | Optics Letters |
Volume | 23 |
Issue number | 20 |
DOIs | |
State | Published - Oct 15 1998 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics