Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

A. G. Lopez; Harold G. Craighead

doi:10.1364/OL.23.001627

Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

A. G. Lopez, Harold G. Craighead

Research output: Contribution to journal › Article › peer-review

66 Scopus citations

Abstract

We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ∼40 deg. The device is made from a multilayer (SiO₂/Si₃N₄) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.

Original language	English (US)
Pages (from-to)	1627-1629
Number of pages	3
Journal	Optics Letters
Volume	23
Issue number	20
DOIs	https://doi.org/10.1364/OL.23.001627
State	Published - Oct 15 1998

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

Access to Document

10.1364/OL.23.001627

Fingerprint Dive into the research topics of 'Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating'. Together they form a unique fingerprint.

Cite this

@article{2622809ed88e44f4b175f3801973f010,

title = "Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating",

abstract = "We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ∼40 deg. The device is made from a multilayer (SiO2/Si3N4) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.",

author = "Lopez, {A. G.} and Craighead, {Harold G.}",

year = "1998",

month = oct,

day = "15",

doi = "10.1364/OL.23.001627",

language = "English (US)",

volume = "23",

pages = "1627--1629",

journal = "Optics Letters",

issn = "0146-9592",

publisher = "The Optical Society",

number = "20",

}

TY - JOUR

T1 - Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

AU - Lopez, A. G.

AU - Craighead, Harold G.

PY - 1998/10/15

Y1 - 1998/10/15

N2 - We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ∼40 deg. The device is made from a multilayer (SiO2/Si3N4) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.

AB - We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ∼40 deg. The device is made from a multilayer (SiO2/Si3N4) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.

UR - http://www.scopus.com/inward/record.url?scp=0032531547&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032531547&partnerID=8YFLogxK

U2 - 10.1364/OL.23.001627

DO - 10.1364/OL.23.001627

M3 - Article

C2 - 18091866

AN - SCOPUS:0032531547

VL - 23

SP - 1627

EP - 1629

JO - Optics Letters

JF - Optics Letters

SN - 0146-9592

IS - 20

ER -

Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Cite this