Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

A. G. Lopez, Harold G. Craighead

Research output: Contribution to journalArticle

65 Scopus citations

Abstract

We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ∼40 deg. The device is made from a multilayer (SiO2/Si3N4) surface-relief zeroth-order one-dimensional grating with a period of 0.3 μm. The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.

Original languageEnglish (US)
Pages (from-to)1627-1629
Number of pages3
JournalOptics Letters
Volume23
Issue number20
DOIs
StatePublished - Oct 15 1998

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Fingerprint Dive into the research topics of 'Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating'. Together they form a unique fingerprint.

Cite this