Virus detection using nanoelectromechanical devices

B. Ilic, Y. Yang, H. G. Craighead

Research output: Contribution to journalArticlepeer-review

342 Scopus citations


The binding events of the baculovirus was measured using arrays of chemically functionalized, surface micromachined polycrystalline silicon cantilevers. The 0.5 μm×6 μm cantilevers have mass sensitivities on the order of 10 -19 g/Hz, that enables to detect an immobilized AcV1 antibody monolayer corresponsing to mass of about 3×10 -15 g. The resonant frequency shift was observed from the adsorbed mass of the virus particles distinguished solutions of virus concentrations and varies between 10 5 and 10 7 pfu/ml. The mass of single-virus particles bound to the cantilever can also be detected using cantilevers.

Original languageEnglish (US)
Pages (from-to)2604-2606
Number of pages3
JournalApplied Physics Letters
Issue number13
StatePublished - Sep 27 2004

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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