Ultra‐High‐Resolution electron‐beam lithography

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

A conventional TEM/STEM has been used for the fabrication of ∼ 10 nm–size structures by electron‐beam lithography. The electron microscope provides a versatile tool for studying the lithographic process with control of the beam energy, current, and profile combined with the ability to image both the probe and fabricated structures. Straightforward techniques are described for generating ultrasmall structures for physics and device experiments on both bulk substrates and on thin films. New resist processes and the effects of electron‐beam energy as studied by these techniques are discussed.

Original languageEnglish (US)
Pages (from-to)147-155
Number of pages9
JournalJournal of Electron Microscopy Technique
Volume2
Issue number2
DOIs
StatePublished - 1985

Keywords

  • Electron‐beam lithography
  • Polymethylmethacrylate
  • TEM/STEM

ASJC Scopus subject areas

  • Anatomy

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