Abstract
Arrays of silver and gold-palladium particles smaller than 10 nm in diameter and center-to-center spacings as low as 25 nm have been fabricated by electron-beam contamination lithography in a scanning transmission electron microscope and ion milling.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 7186-7188 |
| Number of pages | 3 |
| Journal | Journal of Applied Physics |
| Volume | 53 |
| Issue number | 11 |
| DOIs | |
| State | Published - 1982 |
ASJC Scopus subject areas
- General Physics and Astronomy
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