Ultra-small metal particle arrays produced by high resolution electron-beam lithography

H. G. Craighead; P. M. Mankiewich

doi:10.1063/1.331614

Ultra-small metal particle arrays produced by high resolution electron-beam lithography

H. G. Craighead, P. M. Mankiewich

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

Arrays of silver and gold-palladium particles smaller than 10 nm in diameter and center-to-center spacings as low as 25 nm have been fabricated by electron-beam contamination lithography in a scanning transmission electron microscope and ion milling.

Original language	English (US)
Pages (from-to)	7186-7188
Number of pages	3
Journal	Journal of Applied Physics
Volume	53
Issue number	11
DOIs	https://doi.org/10.1063/1.331614
State	Published - 1982

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/1.331614

Cite this

@article{7afb85e24a3f4fb3ae32c4c676c294d0,

title = "Ultra-small metal particle arrays produced by high resolution electron-beam lithography",

abstract = "Arrays of silver and gold-palladium particles smaller than 10 nm in diameter and center-to-center spacings as low as 25 nm have been fabricated by electron-beam contamination lithography in a scanning transmission electron microscope and ion milling.",

author = "Craighead, {H. G.} and Mankiewich, {P. M.}",

year = "1982",

doi = "10.1063/1.331614",

language = "English (US)",

volume = "53",

pages = "7186--7188",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "11",

}

TY - JOUR

T1 - Ultra-small metal particle arrays produced by high resolution electron-beam lithography

AU - Craighead, H. G.

AU - Mankiewich, P. M.

PY - 1982

Y1 - 1982

N2 - Arrays of silver and gold-palladium particles smaller than 10 nm in diameter and center-to-center spacings as low as 25 nm have been fabricated by electron-beam contamination lithography in a scanning transmission electron microscope and ion milling.

AB - Arrays of silver and gold-palladium particles smaller than 10 nm in diameter and center-to-center spacings as low as 25 nm have been fabricated by electron-beam contamination lithography in a scanning transmission electron microscope and ion milling.

UR - http://www.scopus.com/inward/record.url?scp=0020207584&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020207584&partnerID=8YFLogxK

U2 - 10.1063/1.331614

DO - 10.1063/1.331614

M3 - Article

AN - SCOPUS:0020207584

VL - 53

SP - 7186

EP - 7188

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 11

ER -

Ultra-small metal particle arrays produced by high resolution electron-beam lithography

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this