Ultra-small metal particle arrays produced by high resolution electron-beam lithography

Harold G. Craighead, P. M. Mankiewich

Research output: Contribution to journalArticle

18 Scopus citations

Abstract

Arrays of silver and gold-palladium particles smaller than 10 nm in diameter and center-to-center spacings as low as 25 nm have been fabricated by electron-beam contamination lithography in a scanning transmission electron microscope and ion milling.

Original languageEnglish (US)
Pages (from-to)7186-7188
Number of pages3
JournalJournal of Applied Physics
Volume53
Issue number11
DOIs
StatePublished - Dec 1 1982

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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