TY - JOUR
T1 - Third-order intermodulation in a micromechanical thermal mixer
AU - Reichenbach, Robert B.
AU - Zalalutdinov, Maxim
AU - Aubin, Keith L.
AU - Rand, Richard
AU - Houston, Brian H.
AU - Parpia, Jeevak M.
AU - Craighead, Harold G.
N1 - Funding Information:
Manuscript received January 10, 2005; revised May 12, 2005. This work was supported in part by the Cornell Center for Materials Research (CCMR), a Materials Research Science and Engineering Center of the National Science Foundation (DMR-0079992). This work was performed in part at the Cornell Nano-Scale Science & Technology Facility (a member of the National Nanofab-rication Users Network) which is supported by the National Science Foundation under Grant ECS-9731293, its users, Cornell University and Industrial Affiliates. Subject Editor N. R. Aluru.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2005/12
Y1 - 2005/12
N2 - A radio frequency (RF) micromechanical shell-type resonator with a resistive thermal actuator is shown to perform as a highly linear, broadband mixer and a high-quality factor post-translation (intermediate frequency) filter. The resistor is capable of frequency translation of RF carrier signals as high as 1.5 GHz to the intermediate frequency of 12.7 MHz. The thermal actuator allows electrical isolation between the input aild output of the mixer-filter, dc bias independent mixing, and provides a 50-Ohm load to match the output of front-end electronics. High linearity is demonstrated in the mixer with a third-order input intercept point of +30 dBm for interferers spaced at a 50-kHz offset from the carrier frequency. A variant of the Duffing oscillator model and finite element modeling are used to analyze the origin of nonlinearities in the micromechanical system.
AB - A radio frequency (RF) micromechanical shell-type resonator with a resistive thermal actuator is shown to perform as a highly linear, broadband mixer and a high-quality factor post-translation (intermediate frequency) filter. The resistor is capable of frequency translation of RF carrier signals as high as 1.5 GHz to the intermediate frequency of 12.7 MHz. The thermal actuator allows electrical isolation between the input aild output of the mixer-filter, dc bias independent mixing, and provides a 50-Ohm load to match the output of front-end electronics. High linearity is demonstrated in the mixer with a third-order input intercept point of +30 dBm for interferers spaced at a 50-kHz offset from the carrier frequency. A variant of the Duffing oscillator model and finite element modeling are used to analyze the origin of nonlinearities in the micromechanical system.
KW - Bandpass filter
KW - Duffing oscillator
KW - Intermediate frequency
KW - Microelectromechanical systems (MEMS)
KW - Mixer
KW - Non-linear oscillations
KW - Radio frequency (RF)
KW - Thermal mechanical coupling
KW - Third-order intermodulation distortion (IM)
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U2 - 10.1109/JMEMS.2005.859080
DO - 10.1109/JMEMS.2005.859080
M3 - Article
AN - SCOPUS:29244484445
VL - 14
SP - 1244
EP - 1252
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 6
ER -