Theoretical and experimental investigation of optical excitation of nano oscillators

Slava Krylov, Bojan Ilic, Marianna Kondratovich, Harold G. Craighead

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the present work we report on theoretical and experimental investigation of optical resonant excitation of nano cantilevers fabricated from silicon nitride and mono-crystalline silicon layers deposited on top of a sacrificial silicon dioxide layer. The thermal energy impinged into the structure was produced by a laser beam focused at the substrate and not at the structure itself. Steady-periodic axisymmetric thermal problem for a multilayered structure heated with a modulated laser was treated analytically using an integral transform technique and verified by finite element analysis which was implemented also for the solution of steady-periodic and transient thermoelastic problems. A transfer function relating the laser source parameters to the NEMS structure response was constructed and influence of various parameters on the nanoelectromechanical structure NEMS response was investigated. Results of analysis backed by experiments indicate that the dominant actuation mechanism in the case of laser spot located in proximity of the structure was primarily thermal.

Original languageEnglish (US)
Title of host publication2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
Pages943-953
Number of pages11
Volume1 PART B
DOIs
StatePublished - Jun 13 2008
Event21st Biennial Conference on Mechanical Vibration and Noise, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007 - Las Vegas, NV, United States
Duration: Sep 4 2007Sep 7 2007

Other

Other21st Biennial Conference on Mechanical Vibration and Noise, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007
CountryUnited States
CityLas Vegas, NV
Period9/4/079/7/07

ASJC Scopus subject areas

  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Mechanical Engineering
  • Modeling and Simulation

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