Synchronous imaging for rapid visualization of complex vibration profiles in electromechanical microresonators

Yoav Linzon, Daniel J. Joe, Bojan IIic, Juraj Topolancik, Jeevak M. Parpia, Harold G. Craighead, Slava Krylov

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

Synchronous imaging is used for the dynamic space-domain studies of vibration profiles in capacitively driven, thin n + doped polysilicon microbridges oscillating at rf frequencies. Fast and high-resolution actuation profile measurements of micromachined resonators are useful when significant device nonlinearities are present. For example, bridges under compressive stress near the critical Euler value often reveal complex dynamics stemming from a state close to the onset of buckling. This leads to enhanced sensitivity of the vibration modes to external conditions, such as pressure, temperatures, and chemical composition, the global behavior of which can be conveniently evaluated using synchronous imaging combined with spectral measurements. We performed an experimental study of high drive amplitude and ambient pressure effect on the resonant vibration profiles in electrically driven microbridges near critical buckling. Numerical analysis of electrostatically driven post-buckled microbridges supports the richness of complex vibration dynamics that are possible in such microelectromechanical devices.

Original languageEnglish (US)
Article number023507
JournalJournal of Applied Physics
Volume111
Issue number2
DOIs
StatePublished - Jan 15 2012

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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