Surface modification of micromachined silicon filters

Yuchun Wang, Mauro Ferrari

Research output: Contribution to journalArticlepeer-review

27 Scopus citations


Uniform and ultrathin coatings are needed on the surface of micromachined silicon filters in order to manipulate microfluid flow and minimize non specific protein adsorption. This work reports vapor phase deposition of nanometer thick alkylsilanes at atmospheric pressure using nitrogen as a carrier gas. The coatings were characterized with ellipsometry, SEM, AFM, contact angle goniometry, and zeta potential meter. The method is particularly advantageous when it is necessary to coat small channels in microdevices. Micromachined silicon filters were coated with different alkylsilanes and tested with nitrogen gas and a variety of liquids. Interesting flow rate reversal of water versus ethanol was observed when the minimum channel dimension shrank from 74 microns to 1.8 microns.

Original languageEnglish (US)
Pages (from-to)4923-4930
Number of pages8
JournalJournal of Materials Science
Issue number19
StatePublished - Oct 1 2000

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


Dive into the research topics of 'Surface modification of micromachined silicon filters'. Together they form a unique fingerprint.

Cite this