@article{e0b3e33130f341dc995c792aad0d5aad,
title = "Summary abstract: A study of gallium arsenide and aluminum gallium arsenide reactive ion etching parameters",
author = "A. Scherer and E. Beebe and Craighead, {H. G.}",
note = "Copyright: Copyright 2016 Elsevier B.V., All rights reserved.",
year = "1987",
month = jul,
day = "1",
doi = "10.1116/1.574572",
language = "English (US)",
volume = "5",
pages = "1604--1605",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",
}