Summary abstract: A study of gallium arsenide and aluminum gallium arsenide reactive ion etching parameters

A. Scherer, E. Beebe, H. G. Craighead

Research output: Contribution to journalArticle

2 Scopus citations
Original languageEnglish (US)
Pages (from-to)1604-1605
Number of pages2
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume5
Issue number4
DOIs
StatePublished - Jul 1 1987

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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