Stress-based vapor sensing using resonant microbridges

D. R. Southworth; L. M. Bellan; Y. Linzon; H. G. Craighead; J. M. Parpia

doi:10.1063/1.3393999

Stress-based vapor sensing using resonant microbridges

D. R. Southworth, L. M. Bellan, Y. Linzon, H. G. Craighead, J. M. Parpia

Research output: Contribution to journal › Article › peer-review

61 Scopus citations

Abstract

We demonstrate that silicon-polymer composite microbridges provide a robust means of water vapor detection at ambient pressure. Volumetric changes in the reactive polymer alter the tension in a doubly clamped structure leading to large and rapid changes in the resonance frequency. We demonstrate stress-based sensing of water vapor in ambient pressure nitrogen using doubly clamped buckled beams coated with a hygroscopic polymer. We show stress sensitivity of around 20 kPa (∼170 ppb of water vapor) and subsecond response time for coated microbridges.

Original language	English (US)
Article number	163503
Journal	Applied Physics Letters
Volume	96
Issue number	16
DOIs	https://doi.org/10.1063/1.3393999
State	Published - Apr 19 2010

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.3393999

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title = "Stress-based vapor sensing using resonant microbridges",

abstract = "We demonstrate that silicon-polymer composite microbridges provide a robust means of water vapor detection at ambient pressure. Volumetric changes in the reactive polymer alter the tension in a doubly clamped structure leading to large and rapid changes in the resonance frequency. We demonstrate stress-based sensing of water vapor in ambient pressure nitrogen using doubly clamped buckled beams coated with a hygroscopic polymer. We show stress sensitivity of around 20 kPa (∼170 ppb of water vapor) and subsecond response time for coated microbridges.",

author = "Southworth, {D. R.} and Bellan, {L. M.} and Y. Linzon and Craighead, {H. G.} and Parpia, {J. M.}",

note = "Funding Information: Fabrication was performed at the Cornell Nano-Scale Science and Technology Facility. This research was supported by Analog Devices and DARPA under Grant No. HR-00011-06-1-0042 and by the NSF under Grant No. DMR-0908634. We thank Joshua Cross, Philip Waggoner, and Elaine Guidero for their assistance and commentary.",

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doi = "10.1063/1.3393999",

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T1 - Stress-based vapor sensing using resonant microbridges

AU - Southworth, D. R.

AU - Bellan, L. M.

AU - Linzon, Y.

AU - Craighead, H. G.

AU - Parpia, J. M.

N1 - Funding Information: Fabrication was performed at the Cornell Nano-Scale Science and Technology Facility. This research was supported by Analog Devices and DARPA under Grant No. HR-00011-06-1-0042 and by the NSF under Grant No. DMR-0908634. We thank Joshua Cross, Philip Waggoner, and Elaine Guidero for their assistance and commentary.

PY - 2010/4/19

Y1 - 2010/4/19

N2 - We demonstrate that silicon-polymer composite microbridges provide a robust means of water vapor detection at ambient pressure. Volumetric changes in the reactive polymer alter the tension in a doubly clamped structure leading to large and rapid changes in the resonance frequency. We demonstrate stress-based sensing of water vapor in ambient pressure nitrogen using doubly clamped buckled beams coated with a hygroscopic polymer. We show stress sensitivity of around 20 kPa (∼170 ppb of water vapor) and subsecond response time for coated microbridges.

AB - We demonstrate that silicon-polymer composite microbridges provide a robust means of water vapor detection at ambient pressure. Volumetric changes in the reactive polymer alter the tension in a doubly clamped structure leading to large and rapid changes in the resonance frequency. We demonstrate stress-based sensing of water vapor in ambient pressure nitrogen using doubly clamped buckled beams coated with a hygroscopic polymer. We show stress sensitivity of around 20 kPa (∼170 ppb of water vapor) and subsecond response time for coated microbridges.

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Stress-based vapor sensing using resonant microbridges

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