Stress-based resonant volatile gas microsensor operated near the critically buckled state

Keyphrases

• Poly(methyl methacrylate) 100%
• Polysilicon 100%
• Stress-driven 100%
• Resonance Frequency Shift 100%
• Gas Nanosensor 100%
• Volatile Gases 100%
• Large Gap 100%
• Resonator 50%
• Delivery System 50%
• Pressure Condition 50%
• Resonant Frequency 50%
• Stress-induced 50%
• Response Time 50%
• Squeeze Film 50%
• Silicon Resonator 50%
• Concentration Change 50%
• Chemical Vapor 50%
• Ambient Pressure 50%
• Doubly Clamped 50%
• Residual Stress 50%
• Mechanical Resonator 50%
• Temperature Conditions 50%
• Stress Change 50%
• Gap Result 50%
• Gas Supply 50%
• Ethanol Vapor 50%
• Film Effect 50%
• Frequency Stability 50%
• Critical Buckling Pressure 50%
• Readout System 50%
• Ambient Temperature 50%
• Optical Readout 50%
• Volumetric Swelling 50%

Engineering

• Resonator 100%
• Resonance Frequency 100%
• Microsensor 100%
• Frequency Shift 66%
• Polysilicon 66%
• Response Time 33%
• Q Factor 33%
• Induced Stress 33%
• Residual Stress 33%
• Critical Buckling 33%
• Ambient Pressure 33%
• Temperature Condition 33%
• Buckling Stress 33%