Stress and texture analysis of zirconia coatings by XRD total pattern fitting

Luca Lutterotti, Paolo Polonioli, Paolo G. Orsini, Mauro Ferrari

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

Calcia stabilized zirconia films on silicon substrates were made by magnetron sputtering using different deposition parameters. The relationships between the micromechanical properties of the coatings and the deposition process were studied employing a new x-ray diffraction procedure. The proposed method analyzes simultaneously the residual stress state and the texture of the films in a unified way using wide range of x-ray data collected at different tiltings of the sample. The method takes advantage of a micromechanical model to obtain the residual stress field and the effective elastic modulus from the experimental data. The microstructure of the coatings is incorporated on the model and the harmonic approximation is used to describe the texture of the samples. The results obtained by this new procedure are compared with the traditional methods as the curvature analysis for the residual stresses and the pole figures analysis for the texture.

Original languageEnglish
Title of host publicationAmerican Society of Mechanical Engineers, Petroleum Division (Publication) PD
Editors Anon
Place of PublicationNew York, NY, United States
PublisherPubl by ASME
Pages15-20
Number of pages6
Volume62
StatePublished - Jan 1 1994
EventProceedings of the Energy-Sources Technology Conference - New Orleans, LA, USA
Duration: Jan 23 1994Jan 26 1994

Other

OtherProceedings of the Energy-Sources Technology Conference
CityNew Orleans, LA, USA
Period1/23/941/26/94

ASJC Scopus subject areas

  • Geology
  • Geotechnical Engineering and Engineering Geology

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