Simulation of a piezoelectrically actuated valveless micropump

B. Fan, G. Song, Fazle Hussain

Research output: Contribution to journalArticlepeer-review

97 Scopus citations


This paper numerically studies the performance of a piezoelectrically actuated valveless micropump with consideration of the three-way electro-mechanical-fluid couplings. Simulation of the piezoelectrically actuated valveless micropump (PVAM) indicates that both the pumping rate and the membrane deflection amplitude increase with the increase of the actuating frequency in a low frequency range (<7.5 kHz). However, because of the electro-mechanical-fluid couplings, the membrane deflects in an undesirable way at high frequencies. This will lower the pumping rate at high frequencies (>7.5 kHz). At even higher frequencies (>50 kHz), the pumping rate decreases further because the deflection amplitude decreases. This agrees with reported experimental results. The changing membrane deflection shapes at various frequencies clearly play an important role in the performance of the pump.

Original languageEnglish (US)
Pages (from-to)400-405
Number of pages6
JournalSmart Materials and Structures
Issue number2
StatePublished - Apr 1 2005

ASJC Scopus subject areas

  • Signal Processing
  • Civil and Structural Engineering
  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Electrical and Electronic Engineering


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