Abstract
Silicon-based clean-room technology is employed for the microfabrication of a particle filter with uniform pore dimensions in the 20-40-nm range. Surface and bulk micromachining are integrated in the fabrication process, resulting in a filtering membrane with large active area, flow rate and resistance to pressure. The microfabricated membrane is especially suitable for biofluid purification, including viral elimination. The nanofilter is a technological precursor for a microfabricated, silicon-based capsule to be employed in the reaction-free xenotransplantation of cells. Results are presented below that address the issue of biocompatibility of the microfabricated capsule components and materials.
| Original language | English (US) |
|---|---|
| Title of host publication | Materials Research Society Symposium - Proceedings |
| Publisher | Materials Research Society |
| Pages | 101-106 |
| Number of pages | 6 |
| Volume | 414 |
| State | Published - 1996 |
| Event | Proceedings of the 1995 MRS Fall Meeting - Boston, MA, USA Duration: Nov 26 1995 → Dec 1 1995 |
Other
| Other | Proceedings of the 1995 MRS Fall Meeting |
|---|---|
| City | Boston, MA, USA |
| Period | 11/26/95 → 12/1/95 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
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