Silicon nanotechnology for biofiltration and immunoisolated cell xenografts

Mauro Ferrari, W. Chu, T. Desai, D. Hansford, G. Mazzoni, T. Huen, M. Zhang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

19 Scopus citations


Silicon-based clean-room technology is employed for the microfabrication of a particle filter with uniform pore dimensions in the 20-40-nm range. Surface and bulk micromachining are integrated in the fabrication process, resulting in a filtering membrane with large active area, flow rate and resistance to pressure. The microfabricated membrane is especially suitable for biofluid purification, including viral elimination. The nanofilter is a technological precursor for a microfabricated, silicon-based capsule to be employed in the reaction-free xenotransplantation of cells. Results are presented below that address the issue of biocompatibility of the microfabricated capsule components and materials.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Number of pages6
StatePublished - 1996
EventProceedings of the 1995 MRS Fall Meeting - Boston, MA, USA
Duration: Nov 26 1995Dec 1 1995


OtherProceedings of the 1995 MRS Fall Meeting
CityBoston, MA, USA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials


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