Shell-type micromechanical actuator and resonator

Maxim Zalalutdinov; Keith L. Aubin; Robert B. Reichenbach; Alan T. Zehnder; Brian Houston; Jeevak M. Parpia; Harold G. Craighead

doi:10.1063/1.1622792

Shell-type micromechanical actuator and resonator

Maxim Zalalutdinov, Keith L. Aubin, Robert B. Reichenbach, Alan T. Zehnder, Brian Houston, Jeevak M. Parpia, Harold G. Craighead

Houston Methodist

Research output: Contribution to journal › Article › peer-review

46 Scopus citations

Abstract

A design for a rf MEMS resonator based on the geometry of a shallow segment of a thin spherical shell is demonstrated. The key feature of the shell actuation mechanism is the local nature of the driving stress introduced at a specific point of the shell.

Original language	English (US)
Pages (from-to)	3815-3817
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	18
DOIs	https://doi.org/10.1063/1.1622792
State	Published - Nov 3 2003

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.1622792

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title = "Shell-type micromechanical actuator and resonator",

abstract = "A design for a rf MEMS resonator based on the geometry of a shallow segment of a thin spherical shell is demonstrated. The key feature of the shell actuation mechanism is the local nature of the driving stress introduced at a specific point of the shell.",

author = "Maxim Zalalutdinov and Aubin, \{Keith L.\} and Reichenbach, \{Robert B.\} and Zehnder, \{Alan T.\} and Brian Houston and Parpia, \{Jeevak M.\} and Craighead, \{Harold G.\}",

year = "2003",

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doi = "10.1063/1.1622792",

language = "English (US)",

volume = "83",

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journal = "Applied Physics Letters",

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publisher = "American Institute of Physics",

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T1 - Shell-type micromechanical actuator and resonator

AU - Zalalutdinov, Maxim

AU - Aubin, Keith L.

AU - Reichenbach, Robert B.

AU - Zehnder, Alan T.

AU - Houston, Brian

AU - Parpia, Jeevak M.

AU - Craighead, Harold G.

PY - 2003/11/3

Y1 - 2003/11/3

N2 - A design for a rf MEMS resonator based on the geometry of a shallow segment of a thin spherical shell is demonstrated. The key feature of the shell actuation mechanism is the local nature of the driving stress introduced at a specific point of the shell.

AB - A design for a rf MEMS resonator based on the geometry of a shallow segment of a thin spherical shell is demonstrated. The key feature of the shell actuation mechanism is the local nature of the driving stress introduced at a specific point of the shell.

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UR - https://www.scopus.com/inward/citedby.url?scp=0345359873&partnerID=8YFLogxK

U2 - 10.1063/1.1622792

DO - 10.1063/1.1622792

M3 - Article

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VL - 83

SP - 3815

EP - 3817

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 18

ER -

Shell-type micromechanical actuator and resonator

Abstract

ASJC Scopus subject areas

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