Shell-type micromechanical actuator and resonator

Maxim Zalalutdinov, Keith L. Aubin, Robert B. Reichenbach, Alan T. Zehnder, Brian Houston, Jeevak M. Parpia, Harold G. Craighead

Research output: Contribution to journalArticle

40 Scopus citations

Abstract

A design for a rf MEMS resonator based on the geometry of a shallow segment of a thin spherical shell is demonstrated. The key feature of the shell actuation mechanism is the local nature of the driving stress introduced at a specific point of the shell.

Original languageEnglish (US)
Pages (from-to)3815-3817
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number18
DOIs
StatePublished - Nov 3 2003

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Shell-type micromechanical actuator and resonator'. Together they form a unique fingerprint.

Cite this