Shell-type micromechanical actuator and resonator

Maxim Zalalutdinov; Keith L. Aubin; Robert B. Reichenbach; Alan T. Zehnder; Brian Houston; Jeevak M. Parpia; Harold G. Craighead

doi:10.1063/1.1622792

Shell-type micromechanical actuator and resonator

Maxim Zalalutdinov, Keith L. Aubin, Robert B. Reichenbach, Alan T. Zehnder, Brian Houston, Jeevak M. Parpia, Harold G. Craighead

Houston Methodist

Research output: Contribution to journal › Article › peer-review

45 Scopus citations

Abstract

A design for a rf MEMS resonator based on the geometry of a shallow segment of a thin spherical shell is demonstrated. The key feature of the shell actuation mechanism is the local nature of the driving stress introduced at a specific point of the shell.

Original language	English (US)
Pages (from-to)	3815-3817
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	18
DOIs	https://doi.org/10.1063/1.1622792
State	Published - Nov 3 2003

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.1622792

Cite this

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title = "Shell-type micromechanical actuator and resonator",

abstract = "A design for a rf MEMS resonator based on the geometry of a shallow segment of a thin spherical shell is demonstrated. The key feature of the shell actuation mechanism is the local nature of the driving stress introduced at a specific point of the shell.",

author = "Maxim Zalalutdinov and Aubin, {Keith L.} and Reichenbach, {Robert B.} and Zehnder, {Alan T.} and Brian Houston and Parpia, {Jeevak M.} and Craighead, {Harold G.}",

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AU - Zalalutdinov, Maxim

AU - Aubin, Keith L.

AU - Reichenbach, Robert B.

AU - Zehnder, Alan T.

AU - Houston, Brian

AU - Parpia, Jeevak M.

AU - Craighead, Harold G.

PY - 2003/11/3

Y1 - 2003/11/3

N2 - A design for a rf MEMS resonator based on the geometry of a shallow segment of a thin spherical shell is demonstrated. The key feature of the shell actuation mechanism is the local nature of the driving stress introduced at a specific point of the shell.

AB - A design for a rf MEMS resonator based on the geometry of a shallow segment of a thin spherical shell is demonstrated. The key feature of the shell actuation mechanism is the local nature of the driving stress introduced at a specific point of the shell.

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JO - Applied Physics Letters

JF - Applied Physics Letters

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Shell-type micromechanical actuator and resonator

Abstract

ASJC Scopus subject areas

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