Self-organization of step bunching instability on vicinal substrate

A. Pascale, I. Berbezier, A. Ronda, A. Videcoq, Alberto Pimpinelli

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16 Scopus citations

Abstract

The authors investigate quantitatively the self-organization of step bunching instability during epitaxy of Si on vicinal Si(001). They show that growth instability evolution can be fitted by power laws L ∼ t α and A ∼ tβ (where L is the correlation length and A is the instability amplitude) with critical exponents α ∼ 0.3 and β ∼ 0.5 in good agreement with previous studies and well reproduced by kinetic Monte Carlo simulation. They demonstrate that the main phenomenon controlling step bunching is the anisotropy of surface diffusion. The microscopic origin of the instability is attributed to an easier adatom detachment from SA step, which can be interpreted as a pseudoinverse Ehrlich-Schwoebel barrier [J. Appl. Phys. 37, 3682 (1967); J. Chem. Phys. 44, 1039 (1966)].

Original languageEnglish (US)
Article number104108
JournalApplied Physics Letters
Volume89
Issue number10
DOIs
StatePublished - Sep 18 2006

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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