Self-assembled monolayers as high-resolution etch masks and templates for organic molecular assembly

Keyphrases

• Artificial Dielectric 33%
• Chemical Coating 33%
• Contrast Enhancement 33%
• Dielectric System 33%
• Diffractive 33%
• Electron Beam Lithography 33%
• Electron Beam Patterning 33%
• Etching Mask 100%
• Etching Process 33%
• High Aspect Ratio Structure 33%
• High-resolution 100%
• Linker Peptide 33%
• Low-energy Electrons 33%
• Molecular Assembly 100%
• One-step Process 33%
• Optical Devices 33%
• Organic Chemicals 33%
• Organic Compounds 33%
• Organic Molecular 100%
• Organic Nanoparticles 33%
• Organic System 33%
• Patternable 33%
• Self-assembled Monolayer 100%
• Self-use 33%
• Subwavelength 33%
• Ultrathin 33%

Material Science

• Dielectric Material 33%
• Lithography 33%
• Monolayer 33%
• Nanoparticle 33%
• Optical Device 33%
• Self Assembled Monolayer 100%