RF MEMS oscillator with integrated resistive transduction

R. B. Reichenbach, M. Zalalutdinov, J. M. Parpia, H. G. Craighead

Research output: Contribution to journalArticlepeer-review

21 Scopus citations


A method to integrate micromechanical frequency-determining elements along with the corresponding electromechanical transducers into a poly or single-crystal silicon film layer is demonstrated. A resistor dissipating several microwatt of power induces high-frequency resonant mechanical motion in a shallow-shell membrane. Transduction from the mechanical to the electrical domain is performed using implanted piezoresistors, which are sensitive to strain produced by resonant motion. Self-sustained oscillations at 10 MHz are demonstrated when the device is directly coupled to a high-impedance operational amplifier and a positive feedback loop. Finally, this letter discuss how the resonator and transducers may be incorporated into standard integrated-circuit technology.

Original languageEnglish (US)
Pages (from-to)805-807
Number of pages3
JournalIEEE Electron Device Letters
Issue number10
StatePublished - 2006


  • CMOS integrated circuits
  • Microelectromechanical devices
  • Oscillators
  • Resistance heating
  • Resonators

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials


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