Resistively Actuated Micromechanical Dome Resonators

Keyphrases

• Thermoelastic Actuator 100%
• Metal Resistor 50%
• Cooling Rate 50%
• Superheterodyne 50%
• Local Oscillator 50%
• Frequency Mixing 50%
• In-plane Stress 50%
• IF Filter 50%
• Polysilicon Film 50%
• Frequency Generator 50%
• Resistive Heater 50%
• AC Signal 50%
• Low Driving Voltage 50%

Engineering

• Polysilicon Film 42%
• Voltage Driving 42%
• Phase Noise 42%
• Superheterodyne 42%
• Local Heating 42%
• Cooling Rate 42%
• Local Oscillator 42%
• Flat Membrane 42%