TY - JOUR
T1 - Reducing anchor loss in MEMS resonators using mesa isolation
AU - Pandey, Manoj
AU - Reichenbach, Robert B.
AU - Zehnder, Alan T.
AU - Lal, Amit
AU - Craighead, Harold G.
N1 - Funding Information:
Manuscript received February 20, 2008; revised November 3, 2008. First published May 27, 2009; current version published July 31, 2009. This work was supported by the Cornell Center for Materials Research, a Materials Science and Engineering Center of the National Science Foundation (DMR 0520404). Subject Editor R. T. Howe.
Funding Information:
The experimental work was performed in part at the Cornell NanoScale Facility, a member of the National Nanotechnology Infrastructure Network, which is supported by the National Science Foundation (Grant ECS 03-35765).
Copyright:
Copyright 2009 Elsevier B.V., All rights reserved.
PY - 2009
Y1 - 2009
N2 - In microelectromechanical systems resonators, dissipation of energy through anchor points into the substrate adds to resonator energy loss, contributing to low values of Q. A design for improving Q based on the reflection of anchor-generated surface acoustic waves is presented here. In this design, the resonator is surrounded by a trench, or a mesa, that partially reflects the wave energy back to the resonator. Depending on the distance from the resonator to the mesa, the reflected wave interferes either constructively or destructively with the resonator, increasing or decreasing Q. The proposed design is experimentally tested using a dome-shaped flexural mode resonator for a range of distances of the mesa from the resonator. Improvements in Q of up to 400% are observed. The resonator/mesa system is modeled using a commercially available finite-element code. Experiments and simulations compare well, suggesting that a finite-element-method analysis can be used in the preliminary design of mesas for the optimization of Q. The concept of using mesas to improve Q is simulated for both flexural and in-plane modes of vibration.
AB - In microelectromechanical systems resonators, dissipation of energy through anchor points into the substrate adds to resonator energy loss, contributing to low values of Q. A design for improving Q based on the reflection of anchor-generated surface acoustic waves is presented here. In this design, the resonator is surrounded by a trench, or a mesa, that partially reflects the wave energy back to the resonator. Depending on the distance from the resonator to the mesa, the reflected wave interferes either constructively or destructively with the resonator, increasing or decreasing Q. The proposed design is experimentally tested using a dome-shaped flexural mode resonator for a range of distances of the mesa from the resonator. Improvements in Q of up to 400% are observed. The resonator/mesa system is modeled using a commercially available finite-element code. Experiments and simulations compare well, suggesting that a finite-element-method analysis can be used in the preliminary design of mesas for the optimization of Q. The concept of using mesas to improve Q is simulated for both flexural and in-plane modes of vibration.
KW - Feedback systems
KW - Finite-element methods
KW - Isolation technology
KW - Optical parametric amplifiers
KW - Q-factor
KW - Surface acoustic waves
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U2 - 10.1109/JMEMS.2009.2016271
DO - 10.1109/JMEMS.2009.2016271
M3 - Article
AN - SCOPUS:68849087448
SN - 1057-7157
VL - 18
SP - 836
EP - 844
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 4
ER -