Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

Y. Linzon; D. Joe; R. A. Barton; R. B. Ilic; S. Krylov; J. M. Parpia; H. G. Craighead

doi:10.1109/MEMSYS.2011.5734467

Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

Y. Linzon, D. Joe, R. A. Barton, R. B. Ilic, S. Krylov, J. M. Parpia, H. G. Craighead

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

The single-shot interferometric imaging of normal mode dynamics in MEMS resonators, oscillating in the radio frequency (rf) regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended silicon and graphene thin-film structures, and their extracted equilibrium profiles, are measured through nondestructive all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the modal patterns of a microdrum silicon resonator is analyzed, and its extracted vibration modes and equilibrium profile show good agreement with other characterization and numerical estimations.

Original language	English (US)
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages	485-488
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734467
State	Published - 2011
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: Jan 23 2011 → Jan 27 2011

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Country/Territory	Mexico
City	Cancun
Period	1/23/11 → 1/27/11

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2011.5734467

Cite this

Linzon, Y., Joe, D., Barton, R. A., Ilic, R. B., Krylov, S., Parpia, J. M., & Craighead, H. G. (2011). Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 485-488). [5734467] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734467

Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles. / Linzon, Y.; Joe, D.; Barton, R. A. et al.

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 485-488 5734467 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Linzon, Y, Joe, D, Barton, RA, Ilic, RB, Krylov, S, Parpia, JM & Craighead, HG 2011, Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734467, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 485-488, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 1/23/11. https://doi.org/10.1109/MEMSYS.2011.5734467

Linzon Y, Joe D, Barton RA, Ilic RB, Krylov S, Parpia JM et al. Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 485-488. 5734467. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734467

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title = "Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles",

abstract = "The single-shot interferometric imaging of normal mode dynamics in MEMS resonators, oscillating in the radio frequency (rf) regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended silicon and graphene thin-film structures, and their extracted equilibrium profiles, are measured through nondestructive all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the modal patterns of a microdrum silicon resonator is analyzed, and its extracted vibration modes and equilibrium profile show good agreement with other characterization and numerical estimations.",

author = "Y. Linzon and D. Joe and Barton, {R. A.} and Ilic, {R. B.} and S. Krylov and Parpia, {J. M.} and Craighead, {H. G.}",

note = "Copyright: Copyright 2011 Elsevier B.V., All rights reserved.; 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",

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doi = "10.1109/MEMSYS.2011.5734467",

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AU - Linzon, Y.

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AU - Krylov, S.

AU - Parpia, J. M.

AU - Craighead, H. G.

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N2 - The single-shot interferometric imaging of normal mode dynamics in MEMS resonators, oscillating in the radio frequency (rf) regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended silicon and graphene thin-film structures, and their extracted equilibrium profiles, are measured through nondestructive all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the modal patterns of a microdrum silicon resonator is analyzed, and its extracted vibration modes and equilibrium profile show good agreement with other characterization and numerical estimations.

AB - The single-shot interferometric imaging of normal mode dynamics in MEMS resonators, oscillating in the radio frequency (rf) regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended silicon and graphene thin-film structures, and their extracted equilibrium profiles, are measured through nondestructive all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the modal patterns of a microdrum silicon resonator is analyzed, and its extracted vibration modes and equilibrium profile show good agreement with other characterization and numerical estimations.

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

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