Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

Y. Linzon, D. Joe, R. A. Barton, R. B. Ilic, S. Krylov, J. M. Parpia, H. G. Craighead

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

The single-shot interferometric imaging of normal mode dynamics in MEMS resonators, oscillating in the radio frequency (rf) regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended silicon and graphene thin-film structures, and their extracted equilibrium profiles, are measured through nondestructive all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the modal patterns of a microdrum silicon resonator is analyzed, and its extracted vibration modes and equilibrium profile show good agreement with other characterization and numerical estimations.

Original languageEnglish (US)
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages485-488
Number of pages4
DOIs
StatePublished - 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: Jan 23 2011Jan 27 2011

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period1/23/111/27/11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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