Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

Y. Linzon; S. Krylov; B. Ilic; D. R. Southworth; R. A. Barton; B. R. Cipriany; J. D. Cross; J. M. Parpia; H. G. Craighead

doi:10.1364/OL.35.002654

Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

Y. Linzon, S. Krylov, B. Ilic, D. R. Southworth, R. A. Barton, B. R. Cipriany, J. D. Cross, J. M. Parpia, H. G. Craighead

Research Institute

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12 Scopus citations

Abstract

Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations.

Original language	English (US)
Pages (from-to)	2654-2656
Number of pages	3
Journal	Optics Letters
Volume	35
Issue number	15
DOIs	https://doi.org/10.1364/OL.35.002654
State	Published - Aug 1 2010

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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title = "Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles",

abstract = "Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations.",

author = "Y. Linzon and S. Krylov and B. Ilic and Southworth, {D. R.} and Barton, {R. A.} and Cipriany, {B. R.} and Cross, {J. D.} and Parpia, {J. M.} and Craighead, {H. G.}",

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T1 - Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

AU - Linzon, Y.

AU - Krylov, S.

AU - Ilic, B.

AU - Southworth, D. R.

AU - Barton, R. A.

AU - Cipriany, B. R.

AU - Cross, J. D.

AU - Parpia, J. M.

AU - Craighead, H. G.

PY - 2010/8/1

Y1 - 2010/8/1

N2 - Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations.

AB - Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations.

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JF - Optics Letters

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Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles

Abstract

ASJC Scopus subject areas

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