Pulsed vacuum and etching systems: Theoretical design considerations for a pulsed vacuum system and its application to XeF2 etching of Si

Arash Kheyraddini Mousavi, Khawar Abbas, Mirza Mohammad Mahbube Elahi, Edidson Lima, Stephen Moya, Joseph Daniel Butner, Denise Piñon, Adeeko Benga, Behnam Kheyraddini Mousavi, Zayd Chad Leseman

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Fingerprint

Dive into the research topics of 'Pulsed vacuum and etching systems: Theoretical design considerations for a pulsed vacuum system and its application to XeF2 etching of Si'. Together they form a unique fingerprint.

Physics & Astronomy

Chemistry

Engineering & Materials Science