Pressure dependent resonant frequency of micromechanical drumhead resonators

D. R. Southworth, H. G. Craighead, J. M. Parpia

Research output: Contribution to journalArticle

47 Scopus citations

Abstract

We examine the relationship between squeeze film effects and resonance frequency in drum-type resonators. We find that the resonance frequency increases linearly with pressure as a result of the additional restoring force contribution from compression of gas within the drum cavity. We demonstrate trapping of the gas by squeeze film effects and geometry. The pressure sensitivity is shown to scale inversely with cavity height and sound radiation is found to be the predominant loss mechanism near and above atmospheric pressure. Drum resonators exhibit linearity and sensitivity suitable to barometry from below 10 Torr up to several atmospheres.

Original languageEnglish (US)
Article number213506
JournalApplied Physics Letters
Volume94
Issue number21
DOIs
StatePublished - 2009

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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