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Dive into the research topics of 'Positive and negative "resistless" lithography of GaAs by electron beam exposure and thermal Cl2 etching'. Together they form a unique fingerprint.- Sort by
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E. M. Clausen, J. P. Harbison, C. C. Chang, P. S.D. Lin, H. G. Craighead, L. T. Florez
Research output: Contribution to journal › Article › peer-review