PHOTOLITHOGRAPHY WITH VUV LASERS.

J. C. White, Harold G. Craighead, R. E. Howard, L. D. Jackel, O. R. Wood

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Unknown Host Publication Title
Place of Publication	New York, NY, USA
Publisher	Institute of Electrical and Electronics Engineers Inc.
State	Published - Jan 1 1984

ASJC Scopus subject areas

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title = "PHOTOLITHOGRAPHY WITH VUV LASERS.",

author = "White, \{J. C.\} and Craighead, \{Harold G.\} and Howard, \{R. E.\} and Jackel, \{L. D.\} and Wood, \{O. R.\}",

year = "1984",

month = jan,

day = "1",

language = "English",

booktitle = "Unknown Host Publication Title",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

address = "United States",

}

TY - GEN

T1 - PHOTOLITHOGRAPHY WITH VUV LASERS.

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AU - Craighead, Harold G.

AU - Howard, R. E.

AU - Jackel, L. D.

AU - Wood, O. R.

PY - 1984/1/1

Y1 - 1984/1/1

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M3 - Conference contribution

AN - SCOPUS:0021290665

BT - Unknown Host Publication Title

PB - Institute of Electrical and Electronics Engineers Inc.

CY - New York, NY, USA

ER -