Optically pumped parametric amplification for micromechanical oscillators

M. Zalalutdinov, A. Olkhovets, A. Zehnder, B. Ilic, D. Czaplewski, H. G. Craighead, J. M. Parpia

Research output: Contribution to journalArticlepeer-review

108 Scopus citations

Abstract

Micromechanical oscillators in the rf range were fabricated in the form of silicon discs supported by a SiO2 pillar at the disk center. A low-power laser beam, (Plaser∼100 μW), focused at the periphery of the disk, causes a significant change of the effective spring constant producing a frequency shift, Δf(Δf/f∼10-4). The high quality factor, Q, of the disk oscillator (Q∼104) allows us to realize parametric amplification of the disk's vibrations through a double frequency modulation of the laser power. An amplitude gain of up to 30 was demonstrated, with further increase limited by nonlinear behavior and self-generation. Phase dependence, inherent in degenerate parametric amplification, was also observed. Using this technique, the sensitivity of detection of a small force is greatly enhanced.

Original languageEnglish (US)
Pages (from-to)3142-3144
Number of pages3
JournalApplied Physics Letters
Volume78
Issue number20
DOIs
StatePublished - May 14 2001

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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