Operation of nanomechanical resonant structures in air

L. Sekaric, M. Zalalutdinov, R. B. Bhiladvala, A. T. Zehnder, J. M. Parpia, H. G. Craighead

Research output: Contribution to journalArticlepeer-review

36 Scopus citations

Abstract

We report on the resonant operation of high-quality-factor silicon nanomechanical structures in air and at room temperature. We describe techniques used to actuate and detect nanomechanical structures in atmosphere, resulting in the enhancement of the effective quality factor to above 1000 and demonstrate the potential for successful sensor operation of resonant nanomechanical structures under ambient conditions.

Original languageEnglish (US)
Pages (from-to)2641-2643
Number of pages3
JournalApplied Physics Letters
Volume81
Issue number14
DOIs
StatePublished - Sep 30 2002

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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