Operation of nanomechanical resonant structures in air

L. Sekaric; M. Zalalutdinov; R. B. Bhiladvala; A. T. Zehnder; J. M. Parpia; H. G. Craighead

doi:10.1063/1.1511287

Operation of nanomechanical resonant structures in air

L. Sekaric, M. Zalalutdinov, R. B. Bhiladvala, A. T. Zehnder, J. M. Parpia, H. G. Craighead

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37 Scopus citations

Abstract

We report on the resonant operation of high-quality-factor silicon nanomechanical structures in air and at room temperature. We describe techniques used to actuate and detect nanomechanical structures in atmosphere, resulting in the enhancement of the effective quality factor to above 1000 and demonstrate the potential for successful sensor operation of resonant nanomechanical structures under ambient conditions.

Original language	English (US)
Pages (from-to)	2641-2643
Number of pages	3
Journal	Applied Physics Letters
Volume	81
Issue number	14
DOIs	https://doi.org/10.1063/1.1511287
State	Published - Sep 30 2002

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.1511287

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title = "Operation of nanomechanical resonant structures in air",

abstract = "We report on the resonant operation of high-quality-factor silicon nanomechanical structures in air and at room temperature. We describe techniques used to actuate and detect nanomechanical structures in atmosphere, resulting in the enhancement of the effective quality factor to above 1000 and demonstrate the potential for successful sensor operation of resonant nanomechanical structures under ambient conditions.",

author = "L. Sekaric and M. Zalalutdinov and Bhiladvala, {R. B.} and Zehnder, {A. T.} and Parpia, {J. M.} and Craighead, {H. G.}",

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AU - Sekaric, L.

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AU - Bhiladvala, R. B.

AU - Zehnder, A. T.

AU - Parpia, J. M.

AU - Craighead, H. G.

PY - 2002/9/30

Y1 - 2002/9/30

N2 - We report on the resonant operation of high-quality-factor silicon nanomechanical structures in air and at room temperature. We describe techniques used to actuate and detect nanomechanical structures in atmosphere, resulting in the enhancement of the effective quality factor to above 1000 and demonstrate the potential for successful sensor operation of resonant nanomechanical structures under ambient conditions.

AB - We report on the resonant operation of high-quality-factor silicon nanomechanical structures in air and at room temperature. We describe techniques used to actuate and detect nanomechanical structures in atmosphere, resulting in the enhancement of the effective quality factor to above 1000 and demonstrate the potential for successful sensor operation of resonant nanomechanical structures under ambient conditions.

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Operation of nanomechanical resonant structures in air

Abstract

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