On-chip coupling of electrochemical pumps and an SU-8 tip for electrospray ionization mass spectrometry

Seung Min Park, Kelvin H. Lee, Harold G. Craighead

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

We present the integration of a cyclo olefin copolymer microfluidic chip with electrochemical pumps and an SU-8 tip for electrospray ionization mass spectrometry. The electrochemical pump, using electrolysis as an internal pressure source, was fabricated directly on the surface of the polymer chip. The triangular SU-8 emitter tip was fabricated on a glass wafer using standard photolithography. After release from the glass wafer, this tip was aligned to the microchannel and bonded between two polymer plates. The electrochemical pump and the electrospray tip were tested with electrospray ionization mass spectrometry. Mass spectrometry confirmed the stability of the electrochemical pump and the electrospray tip.

Original languageEnglish (US)
Pages (from-to)891-897
Number of pages7
JournalBiomedical Microdevices
Volume10
Issue number6
DOIs
StatePublished - 2008

Keywords

  • Electrochemical pump
  • ESI-MS
  • Polymer microfluidic chip
  • SU-8tip

ASJC Scopus subject areas

  • Biomedical Engineering
  • Molecular Biology

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