The development of a method, which used a microfabricated tip as the electrospinning source to create polymer nanofibers, was analyzed. Electrospinning process was applied for depositing oriented poly(methyl methacrylate) fibers having diameters that ranged from 85 to 350 nm. The PMMA fibers were deposited on various substrates such as silicon, aluminum, silicon dioxide, and glass. The objective of the use of polymeric fibers as etch masks was to pattern nanostructures in the surface of a silicon wafer. The electrospinning process was successful in producing nanofibers, which differed in shape and dimensions, based on solution properties and deposition parameters.
|Original language||English (US)|
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - 2003|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering