Nonlithographic approach to nanostructure fabrication using a scanned electrospinning source

David Czaplewski, Jun Kameoka, H. G. Craighead

Research output: Contribution to journalArticle

28 Scopus citations

Abstract

The development of a method, which used a microfabricated tip as the electrospinning source to create polymer nanofibers, was analyzed. Electrospinning process was applied for depositing oriented poly(methyl methacrylate) fibers having diameters that ranged from 85 to 350 nm. The PMMA fibers were deposited on various substrates such as silicon, aluminum, silicon dioxide, and glass. The objective of the use of polymeric fibers as etch masks was to pattern nanostructures in the surface of a silicon wafer. The electrospinning process was successful in producing nanofibers, which differed in shape and dimensions, based on solution properties and deposition parameters.

Original languageEnglish (US)
Pages (from-to)2994-2997
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
StatePublished - 2003

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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