Nanomechanical resonant structures in nanocrystalline diamond

L. Sekaric; J. M. Parpia; H. G. Craighead; T. Feygelson; B. H. Houston; J. E. Butler

doi:10.1063/1.1526941

Nanomechanical resonant structures in nanocrystalline diamond

L. Sekaric, J. M. Parpia, H. G. Craighead, T. Feygelson, B. H. Houston, J. E. Butler

Houston Methodist

Research output: Contribution to journal › Article › peer-review

176 Scopus citations

Abstract

The fabrication and the operation of nanomechanical resonant structures in nanocrystalline diamond was reported. The microwave plasma enhanced chemical vapor deposition technique was used for the growth of continuous diamond films which were as thin as 80 nm. The resonant measurements were obtained to study the elastic properties of these films, which showed the existence of a Young's modulus close to that of single-crystal diamond.

Original language	English (US)
Pages (from-to)	4455-4457
Number of pages	3
Journal	Applied Physics Letters
Volume	81
Issue number	23
DOIs	https://doi.org/10.1063/1.1526941
State	Published - Dec 2 2002

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Nanomechanical resonant structures in nanocrystalline diamond",

abstract = "The fabrication and the operation of nanomechanical resonant structures in nanocrystalline diamond was reported. The microwave plasma enhanced chemical vapor deposition technique was used for the growth of continuous diamond films which were as thin as 80 nm. The resonant measurements were obtained to study the elastic properties of these films, which showed the existence of a Young's modulus close to that of single-crystal diamond.",

author = "L. Sekaric and Parpia, {J. M.} and Craighead, {H. G.} and T. Feygelson and Houston, {B. H.} and Butler, {J. E.}",

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AU - Parpia, J. M.

AU - Craighead, H. G.

AU - Feygelson, T.

AU - Houston, B. H.

AU - Butler, J. E.

PY - 2002/12/2

Y1 - 2002/12/2

N2 - The fabrication and the operation of nanomechanical resonant structures in nanocrystalline diamond was reported. The microwave plasma enhanced chemical vapor deposition technique was used for the growth of continuous diamond films which were as thin as 80 nm. The resonant measurements were obtained to study the elastic properties of these films, which showed the existence of a Young's modulus close to that of single-crystal diamond.

AB - The fabrication and the operation of nanomechanical resonant structures in nanocrystalline diamond was reported. The microwave plasma enhanced chemical vapor deposition technique was used for the growth of continuous diamond films which were as thin as 80 nm. The resonant measurements were obtained to study the elastic properties of these films, which showed the existence of a Young's modulus close to that of single-crystal diamond.

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Nanomechanical resonant structures in nanocrystalline diamond

Abstract

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