Nanomechanical resonant structures in nanocrystalline diamond

L. Sekaric, J. M. Parpia, H. G. Craighead, T. Feygelson, B. H. Houston, J. E. Butler

Research output: Contribution to journalArticle

167 Scopus citations

Abstract

The fabrication and the operation of nanomechanical resonant structures in nanocrystalline diamond was reported. The microwave plasma enhanced chemical vapor deposition technique was used for the growth of continuous diamond films which were as thin as 80 nm. The resonant measurements were obtained to study the elastic properties of these films, which showed the existence of a Young's modulus close to that of single-crystal diamond.

Original languageEnglish (US)
Pages (from-to)4455-4457
Number of pages3
JournalApplied Physics Letters
Volume81
Issue number23
DOIs
StatePublished - Dec 2 2002

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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