Nanomechanical resonant structures as tunable passive modulators of light

L. Sekaric, M. Zalalutdinov, S. W. Turner, A. T. Zehnder, J. M. Parpia, H. G. Craighead

Research output: Contribution to journalArticlepeer-review

24 Scopus citations


We report on the optical parametric excitation of silicon nanomechanical resonant structures. The threshold laser power needed to set these structures into self-oscillation was estimated to be around 70 μW. We measured resonant frequencies of up to 38 MHz by optical excitation; this method should extend to much higher frequencies. Under optical amplification of motion, the spectral response at resonance narrowed to the equivalent of a mechanical quality factor >20000 at room temperature. These structures act as frequency tunable passive modulators of light, requiring no additional drive.

Original languageEnglish (US)
Pages (from-to)3617-3619
Number of pages3
JournalApplied Physics Letters
Issue number19
StatePublished - May 13 2002

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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