We report on the optical parametric excitation of silicon nanomechanical resonant structures. The threshold laser power needed to set these structures into self-oscillation was estimated to be around 70 μW. We measured resonant frequencies of up to 38 MHz by optical excitation; this method should extend to much higher frequencies. Under optical amplification of motion, the spectral response at resonance narrowed to the equivalent of a mechanical quality factor >20000 at room temperature. These structures act as frequency tunable passive modulators of light, requiring no additional drive.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)