Abstract
We report on the optical parametric excitation of silicon nanomechanical resonant structures. The threshold laser power needed to set these structures into self-oscillation was estimated to be around 70 μW. We measured resonant frequencies of up to 38 MHz by optical excitation; this method should extend to much higher frequencies. Under optical amplification of motion, the spectral response at resonance narrowed to the equivalent of a mechanical quality factor >20000 at room temperature. These structures act as frequency tunable passive modulators of light, requiring no additional drive.
Original language | English (US) |
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Pages (from-to) | 3617-3619 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 80 |
Issue number | 19 |
DOIs | |
State | Published - May 13 2002 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)