Nanomechanical oscillators fabricated using polymeric nanofiber templates

Keyphrases

• Polymer Nanofibers 100%
• Nanomechanical Oscillator 100%
• Contact Photolithography 66%
• Nanomechanical Devices 66%
• Continuous Wave 33%
• Wave Detection 33%
• Nanoscale Devices 33%
• Nanofibers 33%
• Poly(methyl methacrylate) 33%
• Interference Technique 33%
• Reactive Ion Etching 33%
• Oscillation Mode 33%
• Silicon Nitride 33%
• Interferometric 33%
• Active Materials 33%
• Deposition Methods 33%
• Moving Beam 33%
• Device Layer 33%
• Device Architecture 33%
• Laser Interference 33%
• Plasma Chemistry 33%
• Micromechanical Structures 33%
• Underlying Layer 33%
• CF4 Plasma 33%
• Rapid Formation 33%
• Support Structure 33%
• Surface Microstructure 33%

Material Science

• Nanofiber 100%
• Oscillator 100%
• Surface (Surface Science) 25%
• Poly Methyl Methacrylate 25%
• Reactive Ion Etching 25%
• Silicon Nitride 25%
• Nanoscale Device 25%