Nanofabrication

Henry I. Smith, Harold G. Craighead

Research output: Contribution to journalArticlepeer-review

49 Scopus citations

Abstract

Building complex semiconductor structures with features as small as 100 atoms across brings quantum effects to life but challenges fabrication technology.

Original languageEnglish
Pages (from-to)24-30
Number of pages7
JournalPhysics Today
Volume43
Issue number2
StatePublished - Feb 1 1990

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Fingerprint

Dive into the research topics of 'Nanofabrication'. Together they form a unique fingerprint.

Cite this