Nanofabrication

Henry I. Smith, Harold G. Craighead

Research output: Contribution to journalArticle

49 Scopus citations

Abstract

Building complex semiconductor structures with features as small as 100 atoms across brings quantum effects to life but challenges fabrication technology.

Original languageEnglish
Pages (from-to)24-30
Number of pages7
JournalPhysics Today
Volume43
Issue number2
StatePublished - Feb 1 1990

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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