Nanofabrication

Henry I. Smith, Harold G. Craighead

Research output: Contribution to journalArticlepeer-review

50 Scopus citations

Abstract

Building complex semiconductor structures with features as small as 100 atoms across brings quantum effects to life but challenges fabrication technology.

Original languageEnglish
Pages (from-to)24-30
Number of pages7
JournalPhysics Today
Volume43
Issue number2
StatePublished - Feb 1 1990

ASJC Scopus subject areas

  • General Physics and Astronomy

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