Nano-pore silicon membrane characterization by diffusion and electrical resistance

Andrea Carbonaro, Rob Walczak, Pasquale Mario Calderale, Mauro Ferrari

Research output: Contribution to journalArticle

14 Scopus citations

Abstract

An inexpensive, non destructive and rapid quality control (QC) procedure for nano-pore silicon membranes is presented. Membranes with different pore sizes were characterized in terms of glucose diffusion and by electrical resistance measurements. Electrical resistance results versus membrane pore size allowed to trace a reference curve to be used to verify the machining process. Diffusion was plotted versus conductance data. An experimental linear relationship was determined, which allows to predict the membrane diffusion properties without running destructive diffusion tests.

Original languageEnglish (US)
Pages (from-to)249-255
Number of pages7
JournalJournal of Membrane Science
Volume241
Issue number2
DOIs
StatePublished - Oct 1 2004

Keywords

  • Electrical conductance
  • Glucose diffusion
  • Membrane pore area
  • Quality control (QC)
  • Silicon membrane

ASJC Scopus subject areas

  • Filtration and Separation
  • Polymers and Plastics

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