Monolithic fabrication of nanofluidic artificial gel media for DNA electrophoresis

S. W. Turner, H. G. Craighead

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


A new technique for fabricating two-dimensional artificial gels for DNA electrophoresis is presented. The technique differs from previous approaches in that the entire device is fabricated as a monolithic unit using exclusively planar processing techniques borrowed from semiconductor electronics fabrication. The height of the fluid gap between the dielectric floor and ceiling is determined by the thickness of a sacrificial layer which is removed by a wet chemical etch. This allows precise control and excellent uniformity of the gap over an entire silicon wafer. Gap control better than 5 nm has been demonstrated for floor-to-ceiling height for the fluid gap. The lateral resolution which can be attained is limited only by available lithographic techniques. In this work, 1 μm diameter pillars are defined with i-line photolithography. Fluid interconnects are established with a liquid meniscus to the edge of the device.

Original languageEnglish (US)
Pages (from-to)114-121
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1998
EventMicro - and Nanofabricated Structures and Devices for Biomedical Environmental Applications - San Jose, CA, United States
Duration: Jan 26 1998Jan 27 1998


  • DNA electrophoresis
  • Nanofabrication
  • Nanofluidics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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