Modal dependence of dissipation in silicon nitride drum resonators

V. P. Adiga; B. Ilic; R. A. Barton; I. Wilson-Rae; H. G. Craighead; J. M. Parpia

doi:10.1063/1.3671150

Modal dependence of dissipation in silicon nitride drum resonators

V. P. Adiga, B. Ilic, R. A. Barton, I. Wilson-Rae, H. G. Craighead, J. M. Parpia

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

We have fabricated large (≤400 μm diameter) high tensile stress SiN membrane mechanical resonators and measured the resonant frequency and quality factors (Q) of different modes of oscillation using optical interferometric detection. We observe that the dissipation (Q ^-1) is limited by clamping loss for pure radial modes, but higher order azimuthal modes are limited by a mechanism which appears to be intrinsic to the material. The observed dissipation is strongly dependent on size of the membrane and mode type. Appropriate choice of size and operating mode allows the selection of optimum resonator designs for applications in mass sensing and optomechanical experiments.

Original language	English (US)
Article number	253103
Journal	Applied Physics Letters
Volume	99
Issue number	25
DOIs	https://doi.org/10.1063/1.3671150
State	Published - Dec 19 2011

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Modal dependence of dissipation in silicon nitride drum resonators",

abstract = "We have fabricated large (≤400 μm diameter) high tensile stress SiN membrane mechanical resonators and measured the resonant frequency and quality factors (Q) of different modes of oscillation using optical interferometric detection. We observe that the dissipation (Q -1) is limited by clamping loss for pure radial modes, but higher order azimuthal modes are limited by a mechanism which appears to be intrinsic to the material. The observed dissipation is strongly dependent on size of the membrane and mode type. Appropriate choice of size and operating mode allows the selection of optimum resonator designs for applications in mass sensing and optomechanical experiments.",

author = "Adiga, {V. P.} and B. Ilic and Barton, {R. A.} and I. Wilson-Rae and Craighead, {H. G.} and Parpia, {J. M.}",

note = "Funding Information: We would like to thank support from Cornell Nanofabrication Facility and we also acknowledge financial support from NSF grants DMR-0908634, ECCS-1001742, and DMR 1120296. I.W.R. acknowledges financial support from the Nanosystems Initiative Munich.",

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doi = "10.1063/1.3671150",

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T1 - Modal dependence of dissipation in silicon nitride drum resonators

AU - Adiga, V. P.

AU - Ilic, B.

AU - Barton, R. A.

AU - Wilson-Rae, I.

AU - Craighead, H. G.

AU - Parpia, J. M.

N1 - Funding Information: We would like to thank support from Cornell Nanofabrication Facility and we also acknowledge financial support from NSF grants DMR-0908634, ECCS-1001742, and DMR 1120296. I.W.R. acknowledges financial support from the Nanosystems Initiative Munich.

PY - 2011/12/19

Y1 - 2011/12/19

N2 - We have fabricated large (≤400 μm diameter) high tensile stress SiN membrane mechanical resonators and measured the resonant frequency and quality factors (Q) of different modes of oscillation using optical interferometric detection. We observe that the dissipation (Q -1) is limited by clamping loss for pure radial modes, but higher order azimuthal modes are limited by a mechanism which appears to be intrinsic to the material. The observed dissipation is strongly dependent on size of the membrane and mode type. Appropriate choice of size and operating mode allows the selection of optimum resonator designs for applications in mass sensing and optomechanical experiments.

AB - We have fabricated large (≤400 μm diameter) high tensile stress SiN membrane mechanical resonators and measured the resonant frequency and quality factors (Q) of different modes of oscillation using optical interferometric detection. We observe that the dissipation (Q -1) is limited by clamping loss for pure radial modes, but higher order azimuthal modes are limited by a mechanism which appears to be intrinsic to the material. The observed dissipation is strongly dependent on size of the membrane and mode type. Appropriate choice of size and operating mode allows the selection of optimum resonator designs for applications in mass sensing and optomechanical experiments.

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Modal dependence of dissipation in silicon nitride drum resonators

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