Microfluidic encapsulated NEMS resonators for sensor applications

Keith L. Aubin; Seung Min Park; Jingqing Huang; Harold G. Craighead; Bojan R. Ilic

doi:10.1109/ICSENS.2005.1597800

Microfluidic encapsulated NEMS resonators for sensor applications

Keith L. Aubin, Seung Min Park, Jingqing Huang, Harold G. Craighead, Bojan R. Ilic

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Scopus citations

Abstract

We present two novel methods to create microfluidic encapsulated nanoelectroniechanical (NEMS) resonator arrays. NEMS arrays were encapsulated in individually accessible parallel microfluidic channels defined in glass. The channels could be filled with fluid as well as evacuated to sub-millitorr pressures for optical measurement of resonant device motion. Each 200 nm thick silicon nitride NEMS resonator was 3 μm wide with lengths ranging from 5 to 10 μm. The demonstrated resonant frequencies ranged from 3 to 10 MHz with quality factors of up to 3,500 (under vacuum). These devices showed no stiction after repeated wetting and drying while in the channels. The presented work demonstrates an important step towards a chip level total analytical system using NEMS devices in applications such as mass based biosensors.

Original language	English (US)
Title of host publication	Proceedings of the Fourth IEEE Conference on Sensors 2005
Pages	720-722
Number of pages	3
Volume	2005
DOIs	https://doi.org/10.1109/ICSENS.2005.1597800
State	Published - Dec 1 2005
Event	Fourth IEEE Conference on Sensors 2005 - Irvine, CA, United States Duration: Oct 31 2005 → Nov 3 2005

Other

Other	Fourth IEEE Conference on Sensors 2005
Country/Territory	United States
City	Irvine, CA
Period	10/31/05 → 11/3/05

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1109/ICSENS.2005.1597800

Cite this

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title = "Microfluidic encapsulated NEMS resonators for sensor applications",

abstract = "We present two novel methods to create microfluidic encapsulated nanoelectroniechanical (NEMS) resonator arrays. NEMS arrays were encapsulated in individually accessible parallel microfluidic channels defined in glass. The channels could be filled with fluid as well as evacuated to sub-millitorr pressures for optical measurement of resonant device motion. Each 200 nm thick silicon nitride NEMS resonator was 3 μm wide with lengths ranging from 5 to 10 μm. The demonstrated resonant frequencies ranged from 3 to 10 MHz with quality factors of up to 3,500 (under vacuum). These devices showed no stiction after repeated wetting and drying while in the channels. The presented work demonstrates an important step towards a chip level total analytical system using NEMS devices in applications such as mass based biosensors.",

author = "Aubin, {Keith L.} and Park, {Seung Min} and Jingqing Huang and Craighead, {Harold G.} and Ilic, {Bojan R.}",

year = "2005",

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doi = "10.1109/ICSENS.2005.1597800",

language = "English (US)",

isbn = "0780390563",

volume = "2005",

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booktitle = "Proceedings of the Fourth IEEE Conference on Sensors 2005",

note = "Fourth IEEE Conference on Sensors 2005 ; Conference date: 31-10-2005 Through 03-11-2005",

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T1 - Microfluidic encapsulated NEMS resonators for sensor applications

AU - Aubin, Keith L.

AU - Park, Seung Min

AU - Huang, Jingqing

AU - Craighead, Harold G.

AU - Ilic, Bojan R.

PY - 2005/12/1

Y1 - 2005/12/1

N2 - We present two novel methods to create microfluidic encapsulated nanoelectroniechanical (NEMS) resonator arrays. NEMS arrays were encapsulated in individually accessible parallel microfluidic channels defined in glass. The channels could be filled with fluid as well as evacuated to sub-millitorr pressures for optical measurement of resonant device motion. Each 200 nm thick silicon nitride NEMS resonator was 3 μm wide with lengths ranging from 5 to 10 μm. The demonstrated resonant frequencies ranged from 3 to 10 MHz with quality factors of up to 3,500 (under vacuum). These devices showed no stiction after repeated wetting and drying while in the channels. The presented work demonstrates an important step towards a chip level total analytical system using NEMS devices in applications such as mass based biosensors.

AB - We present two novel methods to create microfluidic encapsulated nanoelectroniechanical (NEMS) resonator arrays. NEMS arrays were encapsulated in individually accessible parallel microfluidic channels defined in glass. The channels could be filled with fluid as well as evacuated to sub-millitorr pressures for optical measurement of resonant device motion. Each 200 nm thick silicon nitride NEMS resonator was 3 μm wide with lengths ranging from 5 to 10 μm. The demonstrated resonant frequencies ranged from 3 to 10 MHz with quality factors of up to 3,500 (under vacuum). These devices showed no stiction after repeated wetting and drying while in the channels. The presented work demonstrates an important step towards a chip level total analytical system using NEMS devices in applications such as mass based biosensors.

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DO - 10.1109/ICSENS.2005.1597800

M3 - Conference contribution

AN - SCOPUS:33847332614

SN - 0780390563

SN - 9780780390560

VL - 2005

SP - 720

EP - 722

BT - Proceedings of the Fourth IEEE Conference on Sensors 2005

T2 - Fourth IEEE Conference on Sensors 2005

Y2 - 31 October 2005 through 3 November 2005

ER -

Microfluidic encapsulated NEMS resonators for sensor applications

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