Microfluidic encapsulated NEMS resonators for sensor applications

Keith L. Aubin, Seung Min Park, Jingqing Huang, Harold G. Craighead, Bojan R. Ilic

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations


We present two novel methods to create microfluidic encapsulated nanoelectroniechanical (NEMS) resonator arrays. NEMS arrays were encapsulated in individually accessible parallel microfluidic channels defined in glass. The channels could be filled with fluid as well as evacuated to sub-millitorr pressures for optical measurement of resonant device motion. Each 200 nm thick silicon nitride NEMS resonator was 3 μm wide with lengths ranging from 5 to 10 μm. The demonstrated resonant frequencies ranged from 3 to 10 MHz with quality factors of up to 3,500 (under vacuum). These devices showed no stiction after repeated wetting and drying while in the channels. The presented work demonstrates an important step towards a chip level total analytical system using NEMS devices in applications such as mass based biosensors.

Original languageEnglish (US)
Title of host publicationProceedings of the Fourth IEEE Conference on Sensors 2005
Number of pages3
StatePublished - Dec 1 2005
EventFourth IEEE Conference on Sensors 2005 - Irvine, CA, United States
Duration: Oct 31 2005Nov 3 2005


OtherFourth IEEE Conference on Sensors 2005
Country/TerritoryUnited States
CityIrvine, CA

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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