Microfabrication of silicon-based nanoporous particulates for medical applications

Michael H. Cohen, Kristie Melnik, Anthony A. Boiarski, Mauro Ferrari, Frank J. Martin

Research output: Contribution to journalArticle

42 Scopus citations

Abstract

Micron sized particles with nanometer sized pores have been fabricated out of porous silicon and porous silicon dioxide. The porous silicon particles are shaped as hemispherical shells and the porous silicon dioxide particles are asymmetrical squares.

Original languageEnglish (US)
Pages (from-to)253-259
Number of pages7
JournalBiomedical Microdevices
Volume5
Issue number3
DOIs
StatePublished - Sep 2003

ASJC Scopus subject areas

  • Biomedical Engineering
  • Molecular Biology

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