Microfabrication of silicon-based nanoporous particulates for medical applications

Michael H. Cohen, Kristie Melnik, Anthony A. Boiarski, Mauro Ferrari, Frank J. Martin

Research output: Contribution to journalArticlepeer-review

43 Scopus citations


Micron sized particles with nanometer sized pores have been fabricated out of porous silicon and porous silicon dioxide. The porous silicon particles are shaped as hemispherical shells and the porous silicon dioxide particles are asymmetrical squares.

Original languageEnglish (US)
Pages (from-to)253-259
Number of pages7
JournalBiomedical Microdevices
Issue number3
StatePublished - Sep 2003

ASJC Scopus subject areas

  • Biomedical Engineering
  • Molecular Biology


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