Microfabrication as a scientific tool

R. E. Howard, P. F. Liao, W. J. Skocpol, L. D. Jackel, Harold G. Craighead

Research output: Contribution to journalReview article

40 Scopus citations

Abstract

Research in microfabrication not only serves the microelectronics industry but also can provide research tools for studying the behavior of matter at submicrometer dimensions. A variety of techniques including optical, x-ray, and electron beam lithography and reactive ion etching can be used to make structures, devices, and arrays only hundreds of atoms across. Microfabrication techniques have been applied to experiments on surface-enhanced Raman scattering, transport in one-dimensional conductors, and macroscopic quantum tunneling. Recent progress is extending these techniques to scales of less than 100 angstroms.

Original languageEnglish (US)
Pages (from-to)117-121
Number of pages5
JournalScience
Volume221
Issue number4606
DOIs
StatePublished - Jan 1 1983

ASJC Scopus subject areas

  • General

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