Measurement of mechanical resonance and losses in nanometer scale silicon wires

Dustin W. Carr; S. Evoy; L. Sekaric; H. G. Craighead; J. M. Parpia

doi:10.1063/1.124554

Measurement of mechanical resonance and losses in nanometer scale silicon wires

Dustin W. Carr, S. Evoy, L. Sekaric, H. G. Craighead, J. M. Parpia

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281 Scopus citations

Abstract

We present data on nanofabricated suspended silicon wires driven at resonance. The wires are electrostatically driven and detected optically. We have observed wires with widths as small as 45 nm and resonant frequencies as high as 380 MHz. We see a strong dependence of the resonant quality factor on the surface to volume ratio,

Original language	English (US)
Pages (from-to)	920-922
Number of pages	3
Journal	Applied Physics Letters
Volume	75
Issue number	7
DOIs	https://doi.org/10.1063/1.124554
State	Published - Aug 16 1999

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.124554

Cite this

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title = "Measurement of mechanical resonance and losses in nanometer scale silicon wires",

abstract = "We present data on nanofabricated suspended silicon wires driven at resonance. The wires are electrostatically driven and detected optically. We have observed wires with widths as small as 45 nm and resonant frequencies as high as 380 MHz. We see a strong dependence of the resonant quality factor on the surface to volume ratio,",

author = "Carr, {Dustin W.} and S. Evoy and L. Sekaric and Craighead, {H. G.} and Parpia, {J. M.}",

year = "1999",

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doi = "10.1063/1.124554",

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journal = "Applied Physics Letters",

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T1 - Measurement of mechanical resonance and losses in nanometer scale silicon wires

AU - Carr, Dustin W.

AU - Evoy, S.

AU - Sekaric, L.

AU - Craighead, H. G.

AU - Parpia, J. M.

PY - 1999/8/16

Y1 - 1999/8/16

N2 - We present data on nanofabricated suspended silicon wires driven at resonance. The wires are electrostatically driven and detected optically. We have observed wires with widths as small as 45 nm and resonant frequencies as high as 380 MHz. We see a strong dependence of the resonant quality factor on the surface to volume ratio,

AB - We present data on nanofabricated suspended silicon wires driven at resonance. The wires are electrostatically driven and detected optically. We have observed wires with widths as small as 45 nm and resonant frequencies as high as 380 MHz. We see a strong dependence of the resonant quality factor on the surface to volume ratio,

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JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

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Measurement of mechanical resonance and losses in nanometer scale silicon wires

Abstract

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