Measurement of mechanical resonance and losses in nanometer scale silicon wires

Dustin W. Carr, S. Evoy, L. Sekaric, H. G. Craighead, J. M. Parpia

Research output: Contribution to journalArticle

273 Scopus citations

Abstract

We present data on nanofabricated suspended silicon wires driven at resonance. The wires are electrostatically driven and detected optically. We have observed wires with widths as small as 45 nm and resonant frequencies as high as 380 MHz. We see a strong dependence of the resonant quality factor on the surface to volume ratio,

Original languageEnglish (US)
Pages (from-to)920-922
Number of pages3
JournalApplied Physics Letters
Volume75
Issue number7
DOIs
StatePublished - Aug 16 1999

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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