Macrovacancy nucleation on evaporating Si(001)

Alberto Pimpinelli, Jean Jacques Métois

Research output: Contribution to journalArticle

16 Scopus citations

Abstract

Measurements of the nucleation rate of macrovacancies (''Lochkeim'' formation) on Si(001) during high-temperature sublimation are presented. A theoretical description of macrovacancy nucleation on evaporating surfaces is also given. The nucleation rate is shown to follow a non-Arrhenius behavior as a function of temperature. The experiment is seen to compare favorably with the theory.

Original languageEnglish (US)
Pages (from-to)3566-3569
Number of pages4
JournalPhysical Review Letters
Volume72
Issue number22
DOIs
StatePublished - Jan 1 1994

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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