Measurements of the nucleation rate of macrovacancies (''Lochkeim'' formation) on Si(001) during high-temperature sublimation are presented. A theoretical description of macrovacancy nucleation on evaporating surfaces is also given. The nucleation rate is shown to follow a non-Arrhenius behavior as a function of temperature. The experiment is seen to compare favorably with the theory.
ASJC Scopus subject areas
- Physics and Astronomy(all)