Abstract
Measurements of the nucleation rate of macrovacancies (''Lochkeim'' formation) on Si(001) during high-temperature sublimation are presented. A theoretical description of macrovacancy nucleation on evaporating surfaces is also given. The nucleation rate is shown to follow a non-Arrhenius behavior as a function of temperature. The experiment is seen to compare favorably with the theory.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 3566-3569 |
| Number of pages | 4 |
| Journal | Physical Review Letters |
| Volume | 72 |
| Issue number | 22 |
| DOIs | |
| State | Published - Jan 1 1994 |
ASJC Scopus subject areas
- Physics and Astronomy(all)