Macroscopic tuning of nanomechanics: Substrate bending for Reversible control of frequency and quality factor of nanostring resonators

Keyphrases

• Resonator 100%
• Nanomechanics 100%
• Silicon Nitride 100%
• Loss Mechanism 100%
• High Stress 100%
• Tensile Stress 100%
• NanoString 100%
• Stretching Process 100%
• Substrate Bending 100%
• Reversible Control 100%
• Beam Resonators 100%
• Tunability 50%
• Continuous Control 50%
• Frequency Tunability 50%
• Energy Balance 50%
• Room Temperature 50%
• Low Temperature 50%
• High Quality Factor 50%
• Multicrystalline Silicon 50%
• Nanomechanical Resonator 50%
• Cross-sectional Dimension 50%
• Silicon Resonator 50%
• Stress State 50%
• Nitride Devices 50%
• Low Stress 50%
• Doubly Clamped 50%
• Variable Frequency 50%
• Mechanical Resonator 50%
• Bandpass Filter 50%
• Bending Method 50%
• Frequency-variable 50%
• Sensitive Detection 50%
• Frequency Quality 50%
• Signal Processing Applications 50%
• Frequency Reference 50%
• Nanoresonator 50%

Material Science

• Resonator 100%
• Molecular Mechanic 100%
• Silicon Nitride 33%
• Ultimate Tensile Strength 33%
• Silicon 16%
• Single Crystal 16%
• Sensitive Detection 16%