Light-induced parametric amplification in MEMS oscillators

M. Zalalutdinov; A. Olkhovets; A. T. Zehnder; B. Ilic; D. Czaplewcki; J. M. Parpia; Harold G. Craighead

doi:10.1117/12.425400

Light-induced parametric amplification in MEMS oscillators

M. Zalalutdinov, A. Olkhovets, A. T. Zehnder, B. Ilic, D. Czaplewcki, J. M. Parpia, Harold G. Craighead

Research output: Contribution to journal › Conference article › peer-review

Abstract

Micromechanical oscillators in the radio frequency (rf) range were fabricated in the form of silicon discs supported by a SiO₂ pillar at the disc center. Effective spring constant of this oscillator can be controlled within the range Δf/f∼10^-4 by a low power laser beam, (P_laser∼100 μW), focused at the periphery of the disc. Parametric amplification of the disc's vibrations was achieved through a double frequency modulation of the laser power. An amplitude gain of up to 30 was demonstrated, with further increase limited by non-linear behavior and self-generation. Phase dependence, inherent in degenerate parametric amplification, was also observed. Self-modulation of the CW laser beam (P_laser∼100 μW) provided by placing the disc oscillator into a interference pattern setup can lead to parametric self-excitation.

Original language	English (US)
Pages (from-to)	301-309
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4408
DOIs	https://doi.org/10.1117/12.425400
State	Published - Jan 1 2001
Event	Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes, France Duration: Apr 25 2001 → Apr 27 2001

Keywords

High-frequency
Light pumping
MEMS
Oscillator
Parametric amplification

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.425400

Cite this

@article{8be54a97a7ce4140b94f0b3757f5aeaa,

title = "Light-induced parametric amplification in MEMS oscillators",

abstract = "Micromechanical oscillators in the radio frequency (rf) range were fabricated in the form of silicon discs supported by a SiO2 pillar at the disc center. Effective spring constant of this oscillator can be controlled within the range Δf/f∼10-4 by a low power laser beam, (Plaser∼100 μW), focused at the periphery of the disc. Parametric amplification of the disc's vibrations was achieved through a double frequency modulation of the laser power. An amplitude gain of up to 30 was demonstrated, with further increase limited by non-linear behavior and self-generation. Phase dependence, inherent in degenerate parametric amplification, was also observed. Self-modulation of the CW laser beam (Plaser∼100 μW) provided by placing the disc oscillator into a interference pattern setup can lead to parametric self-excitation.",

keywords = "High-frequency, Light pumping, MEMS, Oscillator, Parametric amplification",

author = "M. Zalalutdinov and A. Olkhovets and Zehnder, {A. T.} and B. Ilic and D. Czaplewcki and Parpia, {J. M.} and Craighead, {Harold G.}",

year = "2001",

month = jan,

day = "1",

doi = "10.1117/12.425400",

language = "English (US)",

volume = "4408",

pages = "301--309",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 ; Conference date: 25-04-2001 Through 27-04-2001",

}

TY - JOUR

T1 - Light-induced parametric amplification in MEMS oscillators

AU - Zalalutdinov, M.

AU - Olkhovets, A.

AU - Zehnder, A. T.

AU - Ilic, B.

AU - Czaplewcki, D.

AU - Parpia, J. M.

AU - Craighead, Harold G.

PY - 2001/1/1

Y1 - 2001/1/1

N2 - Micromechanical oscillators in the radio frequency (rf) range were fabricated in the form of silicon discs supported by a SiO2 pillar at the disc center. Effective spring constant of this oscillator can be controlled within the range Δf/f∼10-4 by a low power laser beam, (Plaser∼100 μW), focused at the periphery of the disc. Parametric amplification of the disc's vibrations was achieved through a double frequency modulation of the laser power. An amplitude gain of up to 30 was demonstrated, with further increase limited by non-linear behavior and self-generation. Phase dependence, inherent in degenerate parametric amplification, was also observed. Self-modulation of the CW laser beam (Plaser∼100 μW) provided by placing the disc oscillator into a interference pattern setup can lead to parametric self-excitation.

AB - Micromechanical oscillators in the radio frequency (rf) range were fabricated in the form of silicon discs supported by a SiO2 pillar at the disc center. Effective spring constant of this oscillator can be controlled within the range Δf/f∼10-4 by a low power laser beam, (Plaser∼100 μW), focused at the periphery of the disc. Parametric amplification of the disc's vibrations was achieved through a double frequency modulation of the laser power. An amplitude gain of up to 30 was demonstrated, with further increase limited by non-linear behavior and self-generation. Phase dependence, inherent in degenerate parametric amplification, was also observed. Self-modulation of the CW laser beam (Plaser∼100 μW) provided by placing the disc oscillator into a interference pattern setup can lead to parametric self-excitation.

KW - High-frequency

KW - Light pumping

KW - MEMS

KW - Oscillator

KW - Parametric amplification

UR - http://www.scopus.com/inward/record.url?scp=0034870978&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034870978&partnerID=8YFLogxK

U2 - 10.1117/12.425400

DO - 10.1117/12.425400

M3 - Conference article

AN - SCOPUS:0034870978

VL - 4408

SP - 301

EP - 309

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

T2 - Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

Y2 - 25 April 2001 through 27 April 2001

ER -

Light-induced parametric amplification in MEMS oscillators

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this