Laser annealing for high-Q MEMS resonators

Keith L. Aubin, Maxim Zalalutdinov, Robert B. Reichenbach, Brian Houston, Alan T. Zehnder, Jeevak M. Parpia, Harold G. Craighead

Research output: Contribution to journal › Conference article › peer-review

16 Scopus citations

Fingerprint

Dive into the research topics of 'Laser annealing for high-Q MEMS resonators'. Together they form a unique fingerprint.

Mathematics

Chemistry

Physics & Astronomy

Engineering & Materials Science